GB/T 25915.3-2024 Cleanrooms and associated controlled environments - Part 3: Test methods
1 Scope
This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.
Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational.
This part recommends test apparatus and test procedures for determining performance parameters. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested.
For some of the test items, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document may be used if based on agreement between the customer and the supplier. Alternative methods do not necessarily provide equivalent measurements.
This document is not applicable to the measurement of products or of processes in cleanrooms or separative devices.
Note: This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.
2 Normative references
The following documents contain provisions which, through reference in this text, constitute provisions of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
ISO 14644-1 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
Note: GB/T 25915.1-2021 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015, MOD)
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1 General terms
3.1.1
cleanroom
room within which the number concentration of airborne particles is controlled and classified, and which is designed, constructed and operated in a manner to control the introduction, generation and retention of particles inside the room
Note 1: The class of airborne particle concentration is specified.
Note 2: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be specified and controlled.
Note 3: Other relevant physical parameters might also be controlled as required, e.g. temperature, humidity, pressure, vibration and electrostatic.
[Source: GB/T 25915.1-2021, 3.1.1, modified]
3.1.2
clean zone
restricted room within which the number concentration of airborne particles is controlled and classified, and which is constructed and operated in a manner to control the introduction, generation and retention of particles inside the room
Note 1: The class of airborne particle concentration is specified.
Note 2: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be specified and controlled.
Note 3: A clean zone can be a defined space within a cleanroom or might be achieved by a separative device. Such a device can be located inside or outside a cleanroom.
Note 4: Other relevant physical parameters might also be controlled as required, e.g. temperature, humidity, pressure, vibration and electrostatic.
[Source: GB/T 25915.1-2021, 3.1.2]
3.1.3
installation
cleanroom or one or more clean zones, together with all associated structures, air-treatment systems, services and utilities
3.1.4
separative device
equipment utilizing constructional and dynamic means to create assured levels of separation between the inside and outside of a defined volume
Note: Some industry-specific examples of separative devices are clean air hoods, containment enclosures, glove boxes, isolators and mini-environments.
[Source: GB/T 25915.7-2010, 3.17]
3.1.5
resolution
smallest change in a quantity being measured that causes a perceptible change in the corresponding indication
Note: Resolution may depend on, for example, noise (internal or external) or friction. It may also depend on the value of a quantity being measured.
[Source: GB/T 25915.1-2021, 3.4.1]
3.1.6
sensitivity
quotient of the change in an indication of a measuring system and the corresponding change in a value of the quantity being measured
3.2 Terms related to airborne particles
3.2.1
airborne particle
solid or liquid object suspended in air, viable or non-viable, sized between 1nm and 100μm
Note: For cleanliness classification purposes, refer to GB/T 25915.1-2021, 3.2.1.
3.2.2
count median particle diameter
median particle diameter based on the number of particles
Foreword i
Introduction iv
1 Scope
2 Normative references
3 Terms and definitions
3.1 General terms
3.2 Terms related to airborne particles
3.3 Terms related to air filters and filter systems
3.4 Terms related to airflow and other physical states
3.5 Term related to electrostatic measurement
3.6 Term related to measuring apparatus and measuring conditions
3.7 Terms related to occupancy states
4 Test procedures
4.1 Cleanroom tests
4.2 Principle
5 Test reports
Annex A (Informative) Choice of supporting tests and checklist
Annex B (Informative) Supporting test methods
Annex C (Informative) Test apparatus
Bibliography
