GB/T 25915.3-2010 Cleanrooms and associated controlled environments - Part 3: Test methods
WARNING——The use of this part of GB/T 25915 may involve hazardous materials, operations and equipment. This part of GB/T 25915 does not purport to address all of the safety problems associated with its use. It is the responsibility of the user of this part of GB/T 25915 to establish appropriate safety and health practices and to observe various regulatory limitations prior to use.
1 Scope
This part of GB/T 25915 specifies test methods for designated classification of airborne particle cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational. This part recommends test apparatus and test procedures for determining performance parameters. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this part may be used if based on agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.
This part is not applicable to the measurement of products or of processes in cleanrooms or separative devices.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies.
GB/T 25915.1-2010 Cleanrooms and associated controlled environments - Part 1: classification of air cleanliness (ISO 14644-1:1999, IDT)
GB/T 25915.2-2010 Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with GB/T 25915.1 (ISO 14644-2:2000, IDT)
GB/T 25915.4-2010 Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001, IDT)
ISO 7726:1998 Ergonomics of the thermal environment - Instruments for measuring physical quantities
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1 General
3.1.1
cleanroom
room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation and retention of particles inside the room, and in which other relevant parameters, e.g. temperature, humidity and pressure, are controlled as necessary
[GB/T 25915.1-2010, 2.1.1]
3.1.2
clean zone
dedicated space in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation and retention of particles inside the zone, and in which other relevant parameters, e.g. temperature, humidity and pressure, are controlled as necessary
Note: This zone may be open or enclosed, and may or may not be located within a cleanroom.
[GB/T 25915.1-2010, 2.1.2]
3.1.3
installation
cleanroom or one or more clean zones, together with all associated structures, air-treatment systems, services, and utilities
Note: It is revised from Definition 2.1.3 in GB/T 25915.1-2010.
3.1.4
separative device
equipment utilizing constructional and dynamic means to create assured levels of separation between the inside and outside of a defined volume
Note: Some industry-specific examples of separative devices are clean air hoods, containment enclosures, glove boxes, isolators and mini-environments.
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3.2 Airborne particle measurement
3.2.1
aerosol generator
instrument capable of generating particulate matter having appropriate size range (e.g. 0.05μm to 2μm) at a constant concentration, which may be produced by thermal, hydraulic, pneumatic, ultrasonic or electrostatic means
3.2.2
airborne particle
solid or liquid object suspended in air, viable or non-viable, sized (for the purpose of this part of GB/T 25915) between 1nm and 100μm
Note: For cleanliness classification purposes, refer to GB/T 25915.1-2010, 2.2.1.
Foreword I
Introduction II
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Airborne particle measurement
3.3 Air filters and systems
3.4 Airflow
3.5 Electrostatic measurement
3.6 Measuring apparatus and measuring conditions
3.7 Occupancy states
4 Test procedures
4.1 Cleanroom tests
4.2 Principle
5 Test reports
Annex A (Informative) Choice of tests and the sequence in which to carry them out
Annex B (Informative) Test methods
Annex C (Informative) Test apparatus
Bibliography
