Germanium monocrystal - Measurement of resistivity - DC linear four-point probe
1 Scope
This standard specifies the method of measuring the resistivity of germanium monocrystal by using DC four-point probe method.
This standard is applicable to measuring the resistivity of germanium monocrystal with both specimen thickness and the nearest distance from the edge of specimen to any probe end point greater than 4 times the probe spacing, as well as measuring the resistivity of germanium monocrystal wafer with diameter greater than 10 times the probe spacing and thickness less than 4 times the probe spacing. The measuring range is 1×10-3~1×102Ω·cm.
2 Principle
See Figure 1 for the principle of measurement. Vertically press the four-point probes arranged in a straight line on the flat surface of the semi-infinite specimen. A current I (A) flows between the outer probes 1 and 4, and a voltage U (V) flows between the inner probes 2 and 3. Under certain conditions, the resistivity ρ of specimens near the four-point probes may be calculated using Equations (1) and (2):
Foreword i
1 Scope
2 Principle
3 Instruments and apparatus
4 Measurement procedure
5 Calculation of measuring result
6 Precision
7 Test report
