標(biāo)準(zhǔn)編號:	GB/T 16942-2009
中文名稱:	電子工業(yè)用氣體 氫
英文名稱:	Gas for electronic industry—Hydrogen
中標(biāo)分類:	G86    工業(yè)氣體與化學(xué)氣體
行業(yè)分類:	GB    國家標(biāo)準(zhǔn)
ICS分類:	71.100.20 71.100.20    工業(yè)氣體 71.100.20
發(fā)布機(jī)構(gòu):	中華人民共和國國家質(zhì)量監(jiān)督檢驗(yàn)檢疫總局 中國家標(biāo)準(zhǔn)化管理委員會
發(fā)布日期:	2009-10-30
實(shí)施日期:	2010-5-1
標(biāo)準(zhǔn)狀態(tài):	valid
替代舊標(biāo)準(zhǔn):	GB/T 16942-1997 電子工業(yè)用氣體 氫
翻譯語言:	英文
文件格式:	PDF
中文字符數(shù):	10000 字
翻譯價格(元):	600.0
交付時間:	付款后 1 個工作日

GB/T 16942-2009 Gas for electronic industry - Hydrogen 1 Scope This standard specifies the technical requirements, test methods, packaging, marking, storage and transportation, and safety of hydrogen for electronic industry. This standard is applicable to cylindered, container-compartmented and pipeline-transported hydrogen for electronic industry produced with the hydrogen as raw material by purification. They are mainly used to provide reducing atmosphere, as carrier gas for epitaxial processes and gas distribution raw materials for plasma etchants. Molecular formula: H2. Relative molecular mass: 2.01588 (as per the international relative atomic mass in 2005). 2 Normative references The following normative documents contain provisions which, through reference in this text, constitute provisions of this standard. For dated references, subsequent amendments (excluding corrections) to, or revisions of, any of these publications do not apply to this standard. However parties to agreements based on this standard are encouraged to investigate the possibility of applying the most recent editions of the normative documents indicated below. For undated references, the latest edition of the normative document referred to applies. GB 190-2009 Packing symbol of dangerous goods GB/T 3634.1 Hydrogen - Part 1: Industrial hydrogen GB/T 3723 Sampling of chemical products for industrial use - Safety in sampling GB 4962 Technical safety regulation for gaseous hydrogen use (GB 5099-1994, neq ISO 4705:1993) GB/T 6285 Determination of trace oxygen in gases - Electrochemical method GB 7144 Coloured cylinder mark for gases GB/T 8984 Determination of carbon monoxide, carbon dioxide and hydrocarbon in gases - Gas chromatographic method GB 14194 Rules for filling of permanent gas cylinders Safety supervision regulations for gas cylinders Supervision regulation on safety technology for pressure vessel Provisions on the safety management and supervision for pressure pipelines 3 Technical requirements The quality of hydrogen for electronic industry shall meet those specified in Table 1. Table 1 Technical indicators

Foreword i 1 Scope 2 Normative references 3 Technical requirements 4 Test methods 5 Marking, packaging, storage and transportation, and safety Annex A (Normative) Determination of nitrogen, carbon monoxide and carbon dioxide in hydrogen for electronic industry